Wafer Handling
When the wafer handling equipment manufacturer was confronted with integration of multiple hardware platforms due to varying configurations of cluster tool, it turned to NeST for developing a solution which would deliver the following:
- Flexibility to work on multiple hardware platforms
- Maximize the throughput and minimize idle time
- Provide support to complex interlock conditions
- Intuitive GUI with touch screen resolution
- Robust function with minimum downtime
NeST Approach & Solution
- Developed device interface based upon the combination of hardware units in cluster tool
- Control logic development using model-based controls.
- Provided job scheduling for customized interlocks
- Look and feel of customer interface as per SEMI standards
- Proprietary Framework was advantageously utilized to reduce product development cycle time (<5% of new product development time)
- Rule-based logic control provides robust mechanisms for scheduling tasks
Benefit & Value to the customer
- 30% higher throughput , average processing time reduced by 40%
- Very low downtime feature demonstrated by in-factory performance of high reliability
- Total cost of development reduced by 50 to 60%
Lab-to-fab time reduction by almost 75% due to versatility of framework in new product development
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