Our Capabilities
NeST has hands on experience working with various equipments, processes and products for OEMs and automation solution providers. Services related to Device connectivity, tool control and process control are part of projects undertaken.
Expertise includes integration of :
- Transport sub systems which include Robots, aligners, elevators and indexes
- Vacuum sub system components like pumps, valves, pressure gauges, convectron gauges and pressure switches
- Process control devices like End point Detectors (EPD), chillers, Mass Flow Controllers etc
The devices were connected using diverse protocols such as Serial ASCII, TCP/IP, Ethernet/IP, DeviceNet, ControlNet and CANbus. We have also integrated various PLCs such as Modicon, Siemens, Allen Bradley, Omron, Mitsubishi etc.
Also NeST has built up expertise in connecting to OPC servers for data acquisition as well as exposing data through OPC Servers.
NeST has developed solutions for controlling transport tools for equipments ranging from stand alone tools to cluster tools. Types of tools we have dealt with include:
- 200 mm tools with aligners, loadlock, indexers, single arm and dual arm robots
- 300 mm systems with both atmospheric and vacuum chambers utilizing different types input carrier configurations like SMIF, PDO or open cassette
- Both high and low Vacuum systems using mechanical and turbo pumps
NeST provides 200mm and 300mm solutions SEMI communication and connectivity standards required by semiconductor fabs.
300mm
The main standards supported include:
- Object Services (E39)
- Carrier Management (E87)
- Process Job Management (E40)
- Control Job Management (E94)
- Substrate Tracking (E90)
- Recipe Management (E42)
- Carrier handoff PIO Interface (E84)
200mm
The main features supported include:
- Remote Commands
- Recipe Download and Upload
- Events and Reports
- Communication and Control States
